KR
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Technolgoy
Porous Ceramic Stage: aeroFIX
| Pore Size | 2㎛ | 5㎛ | 15㎛ | 50㎛ | 100㎛ |
|---|---|---|---|---|---|
| Color | Black, White | Gray | Gray | Gray | Gray |
| Porosity | 40% | 35% | 35% | 35% | 35% |
| Surface Resistivity (Measured with TREK 152, 5lb probe) | 106 ~ 109Ω/Sq | ||||
| Main Applications | Inspection stages for Films, Glass, Wafers, FPCB, etc, secondary batteries, floating equipment and various other applications | Inkjet & Coater Adsorption Stages | Non-Contact Adsorption, Inkjet System Chuck Stages, Jump Chucks | Dicing, Back Grinding, and Edge Grinding for Warped Wafers | |
Pore Specification – 2um
| NTKR - 2UM | Analysis Item | Unit | Test Method | Test Result |
|---|---|---|---|---|
| NTKR _ 2um | Average Pore Diameter | μm | Merycury Porosimetry | 2.31 |
| Bulk Density (at 1.81 psia) | g/mL | 2.46 | ||
| Porosity | % | 42.0 |
Pore Specification – 15um
| NTKR - 2UM | Analysis Item | Unit | Test Method | Test Result |
|---|---|---|---|---|
| NTKR _ 15um | Average Pore Diameter | μm | Merycury Porosimetry | 15.7 |
| Bulk Density (at 1.81 psia) | g/mL | 1.92 | ||
| Porosity | % | 36.4 |
Pore Specification – 50um
| NTKR - 2UM | Analysis Item | Unit | Test Method | Test Result |
|---|---|---|---|---|
| NTKR _ 50um | Average Pore Diameter | μm | Merycury Porosimetry | 52.3 |
| Bulk Density (at 1.81 psia) | g/mL | 1.54 | ||
| Porosity | % | 33.5 |
Pore Specification – 100um
| NTKR - 2UM | Analysis Item | Unit | Test Method | Test Result |
|---|---|---|---|---|
| NTKR _ 100um | Average Pore Diameter | μm | Merycury Porosimetry | 102.3 |
| Bulk Density (at 1.81 psia) | g/mL | 2.06 | ||
| Porosity | % | 33.5 |