wafer chuck
It can be used in various processes such as grinding, sawing,
inspection, and cleaning equipment.
With our know-how, we can provide detailed specifications such as
ceramic and base materials according to the customer's purpose of use.
· Supports various processes by adsorbing wafers.
· Application of grinding / sawing / inspection / cleaning equipment, etc.
· Can be designed and manufactured according to various models and needs.
01
Material Damage Prevention
Unlike the existing aluminum hole type, it can be absorbed with porous ceramics made of fine pores to prevent material damage caused by hole marks..
02
High-precision response possible
Our proprietary polishing technology enables the achievement of excellent flatness in the product. (The level of flatness can be negotiated based on the specific requirements of the customer.)
03
Excellent particle resistance
It is a product that can absorb and discharge fine particles generated during material processing using high-porosity ceramics.