NANOTEM KOREA
NANOTEM KOREA, the leader of the next generation of advanced technologies.
air floting unit
It is possible to control the height of a large glass substrate with a stable lifting amount. This enables the transportation of a large glass substrate by lifting it, reducing glass sagging, thereby reducing tack time and improving performance.
precision floating workpiece
| size | 455*400*51mm |
|---|---|
| floor plan | 5㎛ |
| levitation height | 30㎛ ± 5㎛ |
| allowable height | 500*500mm |
simple floating workpiece
| size | 800*400*100mm |
|---|---|
| Floor plan | 10㎛ |
| levitation height | 100㎛이상 |
| allowable height | Suitable for any size, shape |
*The above is the specification of the demo machine, please contact us for specific specifications and sizes.
We can respond to any specification, size and shape.
Advantages of non-contact air floating unit using porous ceramics
01
Adsorption of air, pneumatic control of supply, easy setting
It solves the disadvantages of the existing air floatation unit, such as pneumatic control, adjustment difficulties, and post-management difficulties after set-up, enabling simple installation and easy post-management.
02
No stains or scratches on glass
The stain problem, which is a disadvantage of the existing carbon-based air flotation unit, has been resolved. Carbon, with its high thermal conductivity, used to be susceptible to staining issues caused by temperature differences due to the supply air temperature.
With our solution, we have achieved uniform pore size, eliminating the staining problem associated with temperature variations.
03
Suppression of static electricity generation
The problem of static electricity can occur regardless of whether the conductivity is poor or too good. Research has shown that the most effective surface resistance for suppressing static electricity falls within the range of 10⁶ to 10⁹.
The surface resistance of porous ceramics, including our porous ceramic aeroFIX, is measured to be around 10⁸.
This level of surface resistance proves to be effective in preventing static electricity generation.
Please note that these measurements were conducted under specific conditions, including a temperature of 26°C and a humidity of 50%.
04
No foreign matter or contamination
Carbon-based materials have a challenge of generating dust or black powder on the surface due to the difficulty in achieving complete consolidation.
However, porous ceramics do not experience self-dust generation as they undergo a complete consolidation process.
They exhibit minimal foreign particle generation and contamination.
Measurement method and place
Floating height error data
