KR
By discharging air through the uniform micro pores of the porous ceramic, it safely floats advanced materials such as large glass substrates and wafers at a stable height, fundamentally preventing sagging or fluttering. Our proprietary technology, which individually controls positive pressure (floating) and negative pressure (adsorption), precisely maintains workpiece flatness. This realizes scratch-free, high speed transfer for high value added materials, including FPDs, OLEDs, and solar panels.
By precisely controlling positive pressure (floating) and negative pressure (adsorption) through the micro-pores of the porous ceramic, it maintains a constant height for the workpiece. It is applied in where maintaining a precise focal length is essential such as high resolution vision inspection, lithography, and high precision laser processing guaranteeing extreme flatness.
By floating the workpiece through uniform air discharge, it completely eliminates physical friction, fundamentally blocking scratches and contamination that occur during transfer. It is applied in large OLED glass conveyance, film roll transfer, and logistics conveyor sections, realizing fast and stable conveyance without any damage to the workpiece.